Atomry Thermal ALD/ALE
Specifications
- Stainless steel reactor chamber
- 250C substrate heating (320C optional)
- Substrate sizes 100mm, 200mm and 300mm
- Swagelok high-speed ALD valves (4-8 ports)
- MKS MFC-controlled carrier gas
- Convection enhanced Pirani vacuum gauge
- MKS pneumatic isolation valve
- Fully automated with recipe control
- User-friendly graphical user interface
- World-class scientific support team and recipe library
Customizations
- Powder ALD kit with rotating canister, conformal coating of granular substrates
- Ozone (O3) process kit, fully recipe integrated and computer controlled
- Glovebox integration
- Precursor cooling
- Low Vapor Pressure Chemical Delivery Upgrade
- Dome-lid for 3D objects and non-standard substrates
- In-situ ellipsometer metrology upgrade
- In-situ QCM thickness monitor
- Custom vacuum ports for in-situ RGA and IR spectroscopy
